National Emission Standards For Hazardous Air Pollutants (NESHAP) For Source Category: Manufacture Of Semiconductors--Background Information For Proposed Standards.
A draft rule for the regulation of hazardous air pollutants (HAP) from semiconductor manufacturing operations is being proposed under the authority of Section 112(d) of the Clean Air Act. The purpose of this document is to summarize the background information gathered during the development of the semiconductor manufacturing NESHAP.
No new sources that would be classified as major sources are expected to be built n the next five years. Thus, no environmental, energy, or cost impacts are expected for new semiconductor manufacturing facilities. Only one existing facility (Eastman Kodak in Rochester NY) is expected to be a major source at the time of promulgation of the NESHAP. The existing source impacts were based on the Kodak facility.
|Air pollution; Hazardous air pollutants; |
|Office of Air and Radiation|
|Office of Air Quality Planning and Standards|
|Emission Standards Division|
|Background Cost-Related Document|
entire document (PDF, 121.9K, About PDF)